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Effect of fluorine doping on illumination stability of solution-processed IGZO TFTs

Authors
Jung, K.-M.[Jung, K.-M.]Oh, J.[Oh, J.]Kim, K.-R.[Kim, K.-R.]Jung, E.K.[Jung, E.K.]Lee, J.[Lee, J.]Kim, Y.-S.[Kim, Y.-S.]
Issue Date
2019
Publisher
International Display Workshops
Keywords
A-IGZO; Fluorine; Oxide semiconductor; Passivation; Thin-film transistors
Citation
Proceedings of the International Display Workshops, v.2, pp.545 - 547
Indexed
SCOPUS
Journal Title
Proceedings of the International Display Workshops
Volume
2
Start Page
545
End Page
547
URI
https://scholarworks.bwise.kr/skku/handle/2021.sw.skku/93964
ISSN
1883-2490
Abstract
This study investigated the effect of F doping though NBIS comparison between F-doped and conventional IGZO TFTs. The oxygen vacancies in the IGZO layer were reduced and the bandgap of the IGZO was widened by F doping. As a result of this, the illumination stability of F doped-TFTs was improved. © 2019 ITE and SID.
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