Effect of fluorine doping on illumination stability of solution-processed IGZO TFTs
- Authors
- Jung, K.-M.[Jung, K.-M.]; Oh, J.[Oh, J.]; Kim, K.-R.[Kim, K.-R.]; Jung, E.K.[Jung, E.K.]; Lee, J.[Lee, J.]; Kim, Y.-S.[Kim, Y.-S.]
- Issue Date
- 2019
- Publisher
- International Display Workshops
- Keywords
- A-IGZO; Fluorine; Oxide semiconductor; Passivation; Thin-film transistors
- Citation
- Proceedings of the International Display Workshops, v.2, pp.545 - 547
- Indexed
- SCOPUS
- Journal Title
- Proceedings of the International Display Workshops
- Volume
- 2
- Start Page
- 545
- End Page
- 547
- URI
- https://scholarworks.bwise.kr/skku/handle/2021.sw.skku/93964
- ISSN
- 1883-2490
- Abstract
- This study investigated the effect of F doping though NBIS comparison between F-doped and conventional IGZO TFTs. The oxygen vacancies in the IGZO layer were reduced and the bandgap of the IGZO was widened by F doping. As a result of this, the illumination stability of F doped-TFTs was improved. © 2019 ITE and SID.
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Collections - Information and Communication Engineering > School of Electronic and Electrical Engineering > 1. Journal Articles
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