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Short-channel pentacene thin-film transistor circuits patterned by lift-off process using PVA and SU-8
- Authors
- Kim M.S.[Kim M.S.]; Oh J.[Oh J.]; Lee S.Y.[Lee S.Y.]; Park K.[Park K.]; Jeon J.-H.[Jeon J.-H.]; Kim Y.-S.[Kim Y.-S.]
- Issue Date
- 2017
- Publisher
- International Display Workshops
- Keywords
- Lift-off; Pentacene TFTs; PVA/SU-8; Top-contact structure
- Citation
- Proceedings of the International Display Workshops, v.1, pp.470 - 472
- Indexed
- SCOPUS
- Journal Title
- Proceedings of the International Display Workshops
- Volume
- 1
- Start Page
- 470
- End Page
- 472
- ISSN
- 1883-2490
- Abstract
- We fabricated short-channel top-contact pentacene thin-film transistors (TFTs) by using lift-off process with PVA/SU-8 bilayer. SU-8 was used as photoresist for short-channel patterning and PVA prevents pentacene from the solvent of SU-8. We also simulated the p-type inverters and 5-stage ring-oscillators with the fabricated TFT model. © 2017 Proceedings of the International Display Workshops. All rights reserved.
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Related Researcher
- KIM, YONG SANG
- Information and Communication Engineering (Electronic and Electrical Engineering)