Effect of hydrofluorocarbon structure of C3H2F6 isomers on high aspect ratio etching of silicon oxide

Abstract

In this study, using three isomers (1,1,1,3,3,3-hexafluoropropane (HFC-236fa), 1,1,1,2,3,3-hexafluoropropane (HFC-236ea), 1,1,2,2,3,3-hexafluoropropane (HFC-236ca)) having the same chemical composition of C3H2F6, effects of chemical branch structure of three C3H2F6 isomers on the plasma characteristics and etch characteristics of high aspect ratio ACL patterned SiO2 were investigated. During the etching of SiO2 and amorphous carbon layer (ACL) using the three isomers mixed with oxygen, different etch characteristics and plasma characteristics were observed. In the plasmas, more CF2 and H but, less F were related to the formation of a fluorocarbon polymer layer on the surface, while lower high mass ion species such as C3HF4+ and, C3H2F5+ were related to the ion bombardment in the order of HFC-236fa, HFC-236ea, and HFC-236ca consequently leading to a lower SiO2 etch rate. Therefore, when C3H2F6 was used, even with the same chemical composition, the chemical branch structure of the compound affected the plasma properties and etch characteristics significantly depending on chemical branches in the compound. We believe that, for other hydrofluorocarbon compounds mixed with a critical oxygen flow rate, plasma properties and SiO2 etch characteristics can be estimated through properties of chemical branches attached in these compounds. © 2022 Elsevier B.V.