Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
인라인 EFEM 클러스터 장비 아키텍처의 모델링 및 분석 사례 연구A Case Study for Modeling and Simulation Analysis of the In-Line EFEM Cluster Tool Architecture
- Other Titles
- A Case Study for Modeling and Simulation Analysis of the In-Line EFEM Cluster Tool Architecture
- Authors
- 한용희
- Issue Date
- Jun-2012
- Publisher
- 한국시뮬레이션학회
- Citation
- 한국시뮬레이션학회 논문지, v.21, no.2, pp.41 - 50
- Journal Title
- 한국시뮬레이션학회 논문지
- Volume
- 21
- Number
- 2
- Start Page
- 41
- End Page
- 50
- ISSN
- 1225-5904
- Files in This Item
- Go to Link
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Han, Yong Hee
- College of Business Administration (Department of Entrepreneurship & Small Business)