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실리콘이 함유되어 있는 Polynorbornenes의 EUV용 포토레지스트로의 응용
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 곽영제 | - |
| dc.date.available | 2018-06-12T10:16:37Z | - |
| dc.date.created | 2018-06-11 | - |
| dc.date.issued | 2005-10 | - |
| dc.identifier.uri | http://scholarworks.bwise.kr/ssu/handle/2018.sw.ssu/30278 | - |
| dc.publisher | 한국섬유공학회 | - |
| dc.title | 실리콘이 함유되어 있는 Polynorbornenes의 EUV용 포토레지스트로의 응용 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.identifier.bibliographicCitation | 한국섬유공학회학술발표회, v.38, no.2, pp.197 - 198 | - |
| dc.description.journalClass | 2 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.endPage | 198 | - |
| dc.citation.number | 2 | - |
| dc.citation.startPage | 197 | - |
| dc.citation.title | 한국섬유공학회학술발표회 | - |
| dc.citation.volume | 38 | - |
| dc.contributor.affiliatedAuthor | 곽영제 | - |
| dc.type.docType | Article; Proceedings Paper | - |
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Related Researcher
- Kwark, Young Je
- College of Engineering (Department of Materials Science and Engineering)