실리콘 함유 하이브리드 물질의 차세대용 포토레지스트로의 응용
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 곽영제 | - |
dc.date.available | 2018-06-12T10:20:33Z | - |
dc.date.created | 2018-06-11 | - |
dc.date.issued | 2005-04 | - |
dc.identifier.uri | http://scholarworks.bwise.kr/ssu/handle/2018.sw.ssu/30489 | - |
dc.publisher | 한국섬유공학회 | - |
dc.title | 실리콘 함유 하이브리드 물질의 차세대용 포토레지스트로의 응용 | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.identifier.bibliographicCitation | 한국섬유공학회학술발표회, v.38, no.1, pp.5 - 5 | - |
dc.description.journalClass | 2 | - |
dc.citation.conferencePlace | KO | - |
dc.citation.endPage | 5 | - |
dc.citation.number | 1 | - |
dc.citation.startPage | 5 | - |
dc.citation.title | 한국섬유공학회학술발표회 | - |
dc.citation.volume | 38 | - |
dc.contributor.affiliatedAuthor | 곽영제 | - |
dc.type.docType | Article; Proceedings Paper | - |
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