Multimodal Sensing with a Three-Dimensional Piezoresistive Structure
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Won, S.M. | - |
dc.contributor.author | Wang, H. | - |
dc.contributor.author | Kim, B.H. | - |
dc.contributor.author | Lee, K. | - |
dc.contributor.author | Jang, H. | - |
dc.contributor.author | Kwon, K. | - |
dc.contributor.author | Han, M. | - |
dc.contributor.author | Crawford, K.E. | - |
dc.contributor.author | Li, H. | - |
dc.contributor.author | Lee, Y. | - |
dc.contributor.author | Yuan, X. | - |
dc.contributor.author | Kim, S.B. | - |
dc.contributor.author | Oh, Y.S. | - |
dc.contributor.author | Jang, W.J. | - |
dc.contributor.author | Lee, J.Y. | - |
dc.contributor.author | Han, S. | - |
dc.contributor.author | Kim, J. | - |
dc.contributor.author | Wang, X. | - |
dc.contributor.author | Xie, Z. | - |
dc.contributor.author | Zhang, Y. | - |
dc.contributor.author | Huang, Y. | - |
dc.contributor.author | Rogers, J.A. | - |
dc.date.available | 2020-09-14T08:07:36Z | - |
dc.date.created | 2019-06-12 | - |
dc.date.issued | 2019-10 | - |
dc.identifier.issn | 1936-0851 | - |
dc.identifier.uri | http://scholarworks.bwise.kr/ssu/handle/2018.sw.ssu/38911 | - |
dc.description.abstract | Sensors that reproduce the complex characteristics of cutaneous receptors in the skin have important potential in the context of artificial systems for controlled interactions with the physical environment. Multimodal responses with high sensitivity and wide dynamic range are essential for many such applications. This report introduces a simple, three-dimensional type of microelectromechanical sensor that incorporates monocrystalline silicon nanomembranes as piezoresistive elements in a configuration that enables separate, simultaneous measurements of multiple mechanical stimuli, such as normal force, shear force, and bending, along with temperature. The technology provides high sensitivity measurements with millisecond response times, as supported by quantitative simulations. The fabrication and assembly processes allow scalable production of interconnected arrays of such devices with capabilities in spatiotemporal mapping. Integration with wireless data recording and transmission electronics allows operation with standard consumer devices. © 2019 American Chemical Society. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | American Chemical Society | - |
dc.relation.isPartOf | ACS Nano | - |
dc.title | Multimodal Sensing with a Three-Dimensional Piezoresistive Structure | - |
dc.type | Article | - |
dc.identifier.doi | 10.1021/acsnano.9b02030 | - |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | ACS Nano, v.13, no.10, pp.10972 - 10979 | - |
dc.description.journalClass | 1 | - |
dc.identifier.wosid | 000492801600011 | - |
dc.identifier.scopusid | 2-s2.0-85066496980 | - |
dc.citation.endPage | 10979 | - |
dc.citation.number | 10 | - |
dc.citation.startPage | 10972 | - |
dc.citation.title | ACS Nano | - |
dc.citation.volume | 13 | - |
dc.contributor.affiliatedAuthor | Kim, B.H. | - |
dc.type.docType | Article | - |
dc.description.isOpenAccess | N | - |
dc.subject.keywordAuthor | electromechanical sensor | - |
dc.subject.keywordAuthor | electronic skin | - |
dc.subject.keywordAuthor | silicon nanomembrane | - |
dc.subject.keywordAuthor | tactile sensor | - |
dc.subject.keywordAuthor | three-dimensional | - |
dc.subject.keywordPlus | Nanostructures | - |
dc.subject.keywordPlus | Three dimensional computer graphics | - |
dc.subject.keywordPlus | Electro-mechanical sensors | - |
dc.subject.keywordPlus | Electronic skin | - |
dc.subject.keywordPlus | High sensitivity measurement | - |
dc.subject.keywordPlus | Microelectromechanical sensors | - |
dc.subject.keywordPlus | Piezoresistive structures | - |
dc.subject.keywordPlus | Silicon nanomembrane | - |
dc.subject.keywordPlus | Simultaneous measurement | - |
dc.subject.keywordPlus | Tactile sensors | - |
dc.subject.keywordPlus | Monocrystalline silicon | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
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