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Hierarchical self-assembly of block copolymers for lithography-free nanopatterning

Authors
Kim, Bong HoonShin, Dong OkJeong, Seong-JunKoo, Chong MinJeon, Sang ChulHwang, Wook JungLee, SumiLee, Moon GyuKim, Sang Ouk
Issue Date
Jun-2008
Publisher
WILEY-V C H VERLAG GMBH
Citation
ADVANCED MATERIALS, v.20, no.12, pp.2303 - +
Journal Title
ADVANCED MATERIALS
Volume
20
Number
12
Start Page
2303
End Page
+
URI
http://scholarworks.bwise.kr/ssu/handle/2018.sw.ssu/39529
DOI
10.1002/adma.200702285
ISSN
0935-9648
Abstract
Hierarchical self-assembly of block copolymers has been achieved by two steps of sequential ordering processes, consisting of self-organized micropatterning from a dewetting block polymer solution and thermal annealing. The self-organized micropattern induces the spontaneous alignment of self-assembled lamellae (see figure), which is successfully applied for a lithography-free, ultra-large-scale nanopatterning.
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