유연한 유기태양전지의 수분 투습 방지를 위해 원자층 증착법으로 제조된 Al2O3 박막에 대한 연구
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 이봄 | - |
dc.contributor.author | 임주현 | - |
dc.contributor.author | 권도윤 | - |
dc.contributor.author | 오영택 | - |
dc.contributor.author | 김시몬 | - |
dc.contributor.author | 신진용 | - |
dc.contributor.author | 임회연 | - |
dc.contributor.author | 이수언 | - |
dc.contributor.author | 김승희 | - |
dc.contributor.author | 김봉훈 | - |
dc.date.available | 2021-02-16T06:40:15Z | - |
dc.date.created | 2021-02-03 | - |
dc.date.issued | 2020-12 | - |
dc.identifier.issn | 1225-1089 | - |
dc.identifier.uri | http://scholarworks.bwise.kr/ssu/handle/2018.sw.ssu/40237 | - |
dc.description.abstract | A moisture barrier layer with high density and uniformity is essential forincreasing the lifespan of optoelectronic devices such as flexible organic solar cells, LEDs,and photodetectors. In this study, various surface pre-treatments (O2 plasma, UVOtreatment, Al seed layer, and thermal annealing process) were performed on a polyethylenenaphthalate (PEN) film to form a functional group of chemical adsorption with the atomiclayer deposition (ALD) precursor. We investigated the effect of the surface pre-treatment ofa PEN substrate for a deposition of Al2O3 thin film in terms of the deposition uniformity andwater vapor transmittance rate (WVTR). For example, the root mean square roughness ofthe bare PEN film/Al2O3 was RRMS=3.26 nm, whereas the O2 plasma treated PEN film/Al2O3had RRMS=0.99 nm because of the presence of a functional group. As a result, WVTR of barePEN film/Al2O3 was 0.83 g/m²/day, whereas that of O2 plasma treated PEN film/Al2O3decreased to 0.38 g/m²/day. | - |
dc.language | 한국어 | - |
dc.language.iso | ko | - |
dc.publisher | 한국섬유공학회 | - |
dc.relation.isPartOf | 한국섬유공학회지 | - |
dc.title | 유연한 유기태양전지의 수분 투습 방지를 위해 원자층 증착법으로 제조된 Al2O3 박막에 대한 연구 | - |
dc.title.alternative | Study on the Atomic Layer Deposition of Al2O3 Thin Film as Moisture Barrier Layer for High Efficiency Flexible Organic Solar Cell | - |
dc.type | Article | - |
dc.identifier.doi | 10.12772/TSE.2020.57.393 | - |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | 한국섬유공학회지, v.57, no.6, pp.393 - 399 | - |
dc.identifier.kciid | ART002672664 | - |
dc.description.journalClass | 2 | - |
dc.citation.endPage | 399 | - |
dc.citation.number | 6 | - |
dc.citation.startPage | 393 | - |
dc.citation.title | 한국섬유공학회지 | - |
dc.citation.volume | 57 | - |
dc.contributor.affiliatedAuthor | 김봉훈 | - |
dc.description.isOpenAccess | N | - |
dc.subject.keywordAuthor | moisture barrier layer | - |
dc.subject.keywordAuthor | water vapor transmittance rate | - |
dc.subject.keywordAuthor | atomic layer deposition | - |
dc.subject.keywordAuthor | polyethylene naphthalate | - |
dc.description.journalRegisteredClass | kci | - |
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