Active-matrix monolithic gas sensor array based on MoS2 thin-film transistors
- Authors
- Kim, Sehwan; Park, Heekyeong; Choo, Sooho; Baek, Seongho; Kwon, Yena; Liu, Na; Yang, Jeong Yong; Yang, Cheol-Woong; Yoo, Geonwook; Kim, Sunkook
- Issue Date
- Nov-2020
- Publisher
- SPRINGERNATURE
- Citation
- COMMUNICATIONS MATERIALS, v.1, no.1
- Journal Title
- COMMUNICATIONS MATERIALS
- Volume
- 1
- Number
- 1
- URI
- http://scholarworks.bwise.kr/ssu/handle/2018.sw.ssu/40416
- DOI
- 10.1038/s43246-020-00086-y
- ISSN
- 2662-4443
- Abstract
- Highly sensitive and system integrable gas sensors play a significant role in industry and daily life, and MoS2 has emerged as one of the most promising two-dimensional nanomaterials for gas sensor technology. In this study, we demonstrate a scalable and monolithically integrated active-matrix gas sensor array based on large-area bilayer MoS2 films synthesized via two-successive steps: radio-frequency magnetron sputtering and thermal sulfurization. The fabricated thin-film transistors exhibit consistent electrical performance over a few centimeters area and resulting gas sensors detect NO2 with ultra-high sensitivity across a wide detection range, from 1 to 256 ppm. This is due to the abundant grain boundaries of the sputtered MoS2 channel, which perform as active sites for absorption of NO2 gas molecules. The demonstrated active-matrix gas sensor arrays display good switching capabilities and are anticipated to be readily integrated with additional circuitry for different gas sensing and monitoring applications.
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