Ultrathin monolithic HfO2 formed by Hf-seeded atomic layer deposition on MoS2: Film characteristics and its transistor application (vol 673, pg 112, 2019)
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Hoijoon | - |
dc.contributor.author | Park, Taejin | - |
dc.contributor.author | Park, Seongjae | - |
dc.contributor.author | Leem, Mirine | - |
dc.contributor.author | Ahn, Wonsik | - |
dc.contributor.author | Lee, Hyangsook | - |
dc.contributor.author | Lee, Changmin | - |
dc.contributor.author | Lee, Eunha | - |
dc.contributor.author | Jeong, Seong-Jun | - |
dc.contributor.author | Park, Seongjun | - |
dc.contributor.author | Kim, Yunseok | - |
dc.contributor.author | Kim, Hyoungsub | - |
dc.date.available | 2021-03-19T02:40:11Z | - |
dc.date.created | 2021-03-19 | - |
dc.date.issued | 2021-03 | - |
dc.identifier.issn | 0040-6090 | - |
dc.identifier.uri | http://scholarworks.bwise.kr/ssu/handle/2018.sw.ssu/40691 | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | ELSEVIER SCIENCE SA | - |
dc.relation.isPartOf | THIN SOLID FILMS | - |
dc.title | Ultrathin monolithic HfO2 formed by Hf-seeded atomic layer deposition on MoS2: Film characteristics and its transistor application (vol 673, pg 112, 2019) | - |
dc.type | Article | - |
dc.identifier.doi | 10.1016/j.tsf.2021.138544 | - |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | THIN SOLID FILMS, v.721 | - |
dc.description.journalClass | 1 | - |
dc.identifier.wosid | 000621728300009 | - |
dc.citation.title | THIN SOLID FILMS | - |
dc.citation.volume | 721 | - |
dc.contributor.affiliatedAuthor | Jeong, Seong-Jun | - |
dc.type.docType | Correction | - |
dc.description.isOpenAccess | N | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Coatings & Films | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.relation.journalWebOfScienceCategory | Physics, Condensed Matter | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
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