Effect of complexing agents on surface composition for co post-CMP cleaning process
- Authors
- Byun, J.; Bae, K.; Kwon, O.; Myong, K.K.; Lim, T.; Kim, J.J.
- Issue Date
- 1-Feb-2021
- Publisher
- IOP Publishing Ltd
- Keywords
- Cobalt; Chemical mechanical polishing; complexing agent; glycine; citric acid; Co oxide layer
- Citation
- ECS Journal of Solid State Science and Technology, v.10, no.2
- Journal Title
- ECS Journal of Solid State Science and Technology
- Volume
- 10
- Number
- 2
- URI
- http://scholarworks.bwise.kr/ssu/handle/2018.sw.ssu/40731
- DOI
- 10.1149/2162-8777/abe7a6
- ISSN
- 2162-8769
- Abstract
- The effect of surface composition change based on complexing agents on cobalt (Co) post-chemical mechanical polishing cleaning (cleaning) is investigated. The change in chemical composition of the Co surface significantly affects Co cleaning performance, as well as dissolution capacity of the complexing agent and pH of cleaning solution. Oxide composition of the Co surface was manipulated using different types of complexing agents. Addition of citric acid and glycine in cleaning solution resulted in predominant formation of Co3O4 and CoOOH on the Co surface, respectively. The citric acid-derived Co3O4 surface embraces abundant –O– terminates, which attracts the complexing agent and silica abrasive relatively weakly, resulting in suppression of recess formation and reduction of surface particle residue after cleaning. On the contrary, the –OH terminated CoOOH surface formed by glycine bound strongly with silica. Therefore, preferential development of Co3O4 on the surface considerably enhances Co cleaning performance, which is achieved by introducing citric acid in the cleaning solution. To sum up, we suggested an unconventional insight to understand the effect of Co surface chemical state on cleaning performance. © 2021 The Electrochemical Society
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - College of Engineering > Department of Chemical Engineering > 1. Journal Articles
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.