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EUV 포토레지스트용 polynorbornene의 합성과 성능평가
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Issue Date
2006
Citation
한국섬유공학회지, v.43, no.5, pp.223 - 227
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한국섬유공학회
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and this trend is expected to con...
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extreme ultraviolet lithography
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photolithography
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polynorbornenes
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ring opening metathesis polymeriz...
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2006
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한국섬유공학회지
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