Rhie, Jiyeah; Lee, Dukhyung; Bahk, Young-Mi; Jeong, Jeeyoon; Choi, Geunchang; Lee, Youjin; Kim, Sunghwan; Hong, Seunghun; Kim, Dai-Sik
ArticleIssue Date2018CitationJOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, v.17, no.2PublisherSPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS