Kim, Sungjun; Kim, Min-Hwi; Kim, Tae-Hyeon; Chen, Ying-Chen; Chang, Yao-Feng; Ismail, Muhammad; Kim, Yoon; Ryoo, Kyung-Chang; Park, Byung-Gook
ArticleIssue Date2018CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.36, no.5PublisherA V S AMER INST PHYSICS