Low temperature rf-sputtered In and Al co-doped ZnO thin films deposited on flexible PET substrate
- Authors
- Park, Sang-Uk; Koh, Jung-Hyuk
- Issue Date
- Aug-2014
- Publisher
- ELSEVIER SCI LTD
- Keywords
- ZnO; Transparent conductive oxide; Rf-sputtering; Flexible substrate
- Citation
- CERAMICS INTERNATIONAL, v.40, no.7, pp 10021 - 10025
- Pages
- 5
- Journal Title
- CERAMICS INTERNATIONAL
- Volume
- 40
- Number
- 7
- Start Page
- 10021
- End Page
- 10025
- URI
- https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/11945
- DOI
- 10.1016/j.ceramint.2014.02.101
- ISSN
- 0272-8842
1873-3956
- Abstract
- Owing to huge developments in the electronics industry, transparent conducting oxide (TCO) thin films have attracted considerable attention for application in flat panel displays and solar cells. Many different types of ZnO-based TCO films have been proposed to replace the rare and expensive indium tin oxide. Until now, Al-doped ZnO thin film has been the most promising alternative material owing to its cheap processing cost and chemical stability. In this research, to enhance the transparency and electrical properties of a TCO thin film, In and Al co-doped ZnO thin films were rf-sputtered onto a flexible polyethylene terephthalate substrate in a low-temperature atmosphere under 200 degrees C. The structural characteristics of the thin films are determined via X-ray diffraction and scanning electron microscopy. The electrical and optical properties are analyzed using a four-point probe and a UV-vis spectrophotometer, respectively. (C) 2014 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - College of ICT Engineering > School of Electrical and Electronics Engineering > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/11945)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.