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Investigation of Sensor Performance in Accumulation- and Inversion-Mode Silicon Nanowire pH Sensors

Authors
Lee, JieunChoi, BongsikHwang, SeonwookLee, Jung HanPark, Byung-GookPark, Tae JungKim, Dong MyongKim, Dae HwanChoi, Sung-Jin
Issue Date
May-2014
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Keywords
Accumulation (ACC)-mode transistor; biosensor; inversion (INV)-mode transistor; ion-sensitive field-effect transistor (FET); silicon nanowire (SiNW) FET
Citation
IEEE TRANSACTIONS ON ELECTRON DEVICES, v.61, no.5, pp 1607 - 1610
Pages
4
Journal Title
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume
61
Number
5
Start Page
1607
End Page
1610
URI
https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/12298
DOI
10.1109/TED.2014.2312413
ISSN
0018-9383
1557-9646
Abstract
We investigate the performance of accumulation (ACC)-mode and inversion (INV)-mode silicon nanowire (SiNW) pH sensors that are electrically controlled by a liquid gate. The two sensing parameters of the changes of threshold voltage and current are explored in both types of SiNW pH sensors at different pH levels. As device dimensions and channel doping concentration increase, the performance of the ACC-mode biosensor degrades more rapidly than the performance of the INV-mode biosensor. Therefore, INV-mode SiNW pH sensors with a liquid gate could be robust to process variation and provide improved current sensitivity.
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자연과학대학 (화학과)
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