Design and Fabrication of Bilayer Wire Grid Polarizer Using Ultraviolet Replicated Nanograting against Nickel Electroformed Nanostamp
- Authors
- Ju, Jonghyun; Han, Yun-ah; Kim, Jwasun; Byeon, Euihyeon; Kim, Seok-min; Lee, Yong-ho; Hwangbo, Chang Kwon
- Issue Date
- Oct-2013
- Publisher
- IOP PUBLISHING LTD
- Citation
- JAPANESE JOURNAL OF APPLIED PHYSICS, v.52, no.10
- Journal Title
- JAPANESE JOURNAL OF APPLIED PHYSICS
- Volume
- 52
- Number
- 10
- URI
- https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/14270
- DOI
- 10.7567/JJAP.52.10MA11
- ISSN
- 0021-4922
1347-4065
- Abstract
- A bilayer wire grid polarizer (B-WGP) composed of UV-replicated nanograting and deposited aluminum layer was designed, fabricated, and evaluated as a simpler and less costly reflective polarizer. To design the B-WGP structure, a parametric study of structural design factors on the simulated performance was conducted using rigorous coupled wave analysis. A durable electroformed nickel stamp was fabricated using a lithographed photo resist master pattern having a nanograting with a pitch of 110 nm, a line width of 65 nm, and a height of 80 nm. A polymer grating was fabricated by the UV replication process, and an aluminum layer with a thickness of 50nm was deposited by electron-beam evaporation. To examine the performance of the fabricated bilayer wire-grid polarizer, the transmission spectra of p-and s-polarized light, and the extinction ratio spectra were measured and compared with the simulated values. The measured transmittance of p-polarized light and the extinction ratio of the fabricated bilayer wire grid polarizer were similar to 40% and similar to 10(3) in whole visible ranges, respectively. (C) 2013 The Japan Society of Applied Physics
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Collections - College of Engineering > School of Mechanical Engineering > 1. Journal Articles
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