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Analysis and design of a high performance and low cost bio-mass sensor based on the radial contour mode disk resonator
- Authors
- Heidari, Amir; Yoon, Yong-Jin; Choi, Hae-Jin
- Issue Date
- Aug-2011
- Publisher
- ELSEVIER SCIENCE BV
- Keywords
- Biosensor; Mass sensitivity; Radial-contour-mode resonator; Motional resistance
- Citation
- MICROELECTRONIC ENGINEERING, v.88, no.8, pp 1730 - 1732
- Pages
- 3
- Journal Title
- MICROELECTRONIC ENGINEERING
- Volume
- 88
- Number
- 8
- Start Page
- 1730
- End Page
- 1732
- ISSN
- 0167-9317
- Abstract
- A high performance and cost effective biosensor is designed based on a radial contour-mode disk resonator. Filling a dielectric material within the capacitive gap, we can achieve low motional resistance (R(x)) in a cost-effective manner. The motional resistance of the new device is characterized analytically and validated using 3D-multiphysics simulation. Compared with other biosensors, the introduced biosensor may detect the smaller mass changes with mass sensitivity of -74.68 mu m(2)/ng (-1617 Hz/ng). (C) 2011 Elsevier B.V. All rights reserved.
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Collections - College of Engineering > School of Mechanical Engineering > 1. Journal Articles
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