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변분근사법을 이용한 FAM 과정의 접촉응력 해석A Contact Stress Analysis in a FAM Process Using Variational Approximation Procedure

Authors
석종원
Issue Date
2004
Publisher
대한기계학회
Keywords
FAM; CMP; Contact Stress; Variational Approximation Procedure; Airy Stress Function; 자유연마입자가공; 화학기계연마; 접촉응력; 변분근사법; Airy 응력함수
Citation
대한기계학회논문집 A, v.28, no.9, pp 1255 - 1261
Pages
7
Journal Title
대한기계학회논문집 A
Volume
28
Number
9
Start Page
1255
End Page
1261
URI
https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/28567
ISSN
1226-4873
Abstract
A variational approximation procedure is introduced to study the contact stresses between a representative asperity and a feature generally happening in superfinishing processes such as FAM. After a description of the model under consideration is presented, a system of governing equation for the model is derived followed by the assumptions made in order to make progress in model development. Final computation is made to evaluate contact stresses on an elastic asperity tip in small scale in size and a computer simulation is performed for detailed surface profile variations on a representative feature. Numerical results are presented along with a discussion of the conclusions that can be drawn from this analysis.
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공과대학 (기계공학부)
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