사중극자 질량 분석기를 이용한 BCl3/Ar 유도결합 플라즈마 특성 진단

Abstract

- In this study, we investigated the ion energy distributions in a chlorine based inductively coupled plasma by quadrupole mass spectrometer with an electrostatic ion energy analyzer. Ion energy distributions are presented for various plasma parameters such as BCl3/Ar gas mixing ratio, RF power, and process pressure. As the BCl3/Ar gas mixing ratio and process pressure decreases, and RF power increases, the saddle-shaped structures is enhanced. The reason is that there are ionized energy difference between BCl3 and Ar, change of plasma potential, alteration of mean free path, and variety of ion collision in the sheath.