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나노스케일의 금속 나노빔 시험편 제작 및이를 이용한 금 박막 나노 구조물의 기계적 물성 평가Fabrication of Nanoscale Metal Nanobeam Specimens and Evaluation of the Mechanical Properties of Gold Thin Film Nanostructures
- Issue Date
- 2007
- Publisher
- 대한전기학회
- Keywords
- NEMS; mechanical properties; freestanding specimens; nanoindentation; nanobeam bending method1
- Citation
- 전기학회논문지ABCD, v.56, no.7, pp 1294 - 1297
- Pages
- 4
- Journal Title
- 전기학회논문지ABCD
- Volume
- 56
- Number
- 7
- Start Page
- 1294
- End Page
- 1297
- ISSN
- 1229-2443
- Abstract
- - In this paper, fabrication techniques for nanoscale metallic nanobeam specimens have been proposed, and mechanical properties of the fabricated gold nanobeams have been evaluated by nanoindentation techniques and nanobeam bending test. Elastic modulus and hardness of gold nanobeams were measured to be 109.6 ± 10 GPa and 1.73 ± 0.3 GPa, respectively, from the nanoindentation test, while elastic modulus was 241 ± 7 GPa from the nanobeam bending test.
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Related Researcher
- Baek, Chang Wook
- 창의ICT공과대학 (전자전기공학부)