Fabrication of all glass microfluidic device with superior chemical and mechanical resistances by glass molding with vitreous carbon mold
- Authors
- Haq, Muhammad Refatul; Kim, Young Kyu; Kim, Jun; Ju, Jonghyun; Kim, Seok-min
- Issue Date
- Jul-2019
- Publisher
- IOP PUBLISHING LTD
- Keywords
- glass micromixer; furan imprinting; vitreous carbon; carbonization process; glass molding process
- Citation
- JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.29, no.7
- Journal Title
- JOURNAL OF MICROMECHANICS AND MICROENGINEERING
- Volume
- 29
- Number
- 7
- URI
- https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/32710
- DOI
- 10.1088/1361-6439/ab1f99
- ISSN
- 0960-1317
1361-6439
- Abstract
- A glass microfluidic device with superior chemical and mechanical resistance was fabricated using a cost-effective glass molding process with a vitreous carbon (VC) mold, which was prepared by the carbonization of a replicated polymer precursor. For the development of microfluidic chips with dense microchannels on a large footprint, a defect-free VC mold is essential. In this study, a furan imprinting process, in which a patterned furan layer was imprinted (cured) on a polished furan plate, was established to minimize warpage and gas bubble defects. In addition, the proposed imprinting process markedly reduced the fabrication time of the furan precursor. For feasibility testing, a glass micromixer with a total channel length of 30.6 cm and footprint of 20 x 20 mm(2) was developed by glass molding with the VC mold and thermal fusion bonding. The fabricated glass-molded micromixer was durable at an internal pressure of similar to 24 MPa, and there was no swelling when used with toluene for an extended time.
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Collections - College of Engineering > School of Mechanical Engineering > 1. Journal Articles
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