Leveling of superfilled damascene Cu film using two-step electrodeposition
- Authors
- Kim, Soo-Kil; Hwang, S; Cho, SK; Kim, JJ
- Issue Date
- Feb-2006
- Publisher
- ELECTROCHEMICAL SOC INC
- Citation
- ELECTROCHEMICAL AND SOLID STATE LETTERS, v.9, no.2, pp C25 - C28
- Journal Title
- ELECTROCHEMICAL AND SOLID STATE LETTERS
- Volume
- 9
- Number
- 2
- Start Page
- C25
- End Page
- C28
- URI
- https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/42450
- DOI
- 10.1149/1.2139976
- ISSN
- 1099-0062
1944-8775
- Abstract
- To enhance the compatibility of electrodeposition with the chemical mechanical polishing process, we attempted to prevent step formation on active areas. In the absence of benzotriazole (BTA), the step heights increased with the decrease in the pattern width and the increase in the pattern density due to the locally condensed accelerator. However, the addition of BTA significantly suppressed the deposition kinetic through the deactivation of the accelerator. The two-step electrodeposition with modulated accelerator and BTA concentrations was found to be effective in the retardation of bump formation and the prevention of bumps from growing without an impact on the superfilling. (c) 2005 The Electrochemical Society.
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - College of ICT Engineering > School of Integrative Engineering > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/42450)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.