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Orientation and fatigue improvement of PZT thin films on cubic textured CaRuO3 electrode
- Authors
- Paik, Hanjong; Hong, Jongin; Jeon, Young-Ah; Kim, Sung Kwan; Kim, Yunseok; Kim, Youngha; Kim, Yang Soo; No, Kwangsoo
- Issue Date
- 2005
- Publisher
- TAYLOR & FRANCIS LTD
- Keywords
- conductive perovskite oxide; film orientation; fatigue improvement; Si substrate
- Citation
- INTEGRATED FERROELECTRICS, v.75, pp 115 - 121
- Pages
- 7
- Journal Title
- INTEGRATED FERROELECTRICS
- Volume
- 75
- Start Page
- 115
- End Page
- 121
- ISSN
- 1058-4587
1607-8489
- Abstract
- In this study, we report on the (100) cube-textured Pb(Zr 0.4 ,Ti 0.6 )O 3 (PZT) thin films using a conducting perovskite CaRuO 3 (CRO) bottom electrode, and which was compared to the (111) textured PZT on Pt electrode. X-ray diffraction (XRD) reveals that the CRO bottom electrode has a pseudo-cubic nature on Si, and the PZT thin films prepared on CRO/Si shows a (100) textured growth. PZT films on CRO electrode have a well-saturated ferroelectricity with a remanent polarization (P r ) and coercive field (E c ) of 25 mu C/cm 2 and 75 kV/cm, respectively. These PZT films are more fatigue resistive character than that on Pt bottom electrode.
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Collections - Graduate School > ETC > 1. Journal Articles
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