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Radiofrequency characteristics of ionized sputtered tantalum nitride thin-film resistor in CMOS device

Authors
Sul, Woo SukKwon, Soon HyeongChoi, EunmiCui, YinhuaLee, Kang WonShim, Ho JaeGao, YuanHahn, Sang JunePyo, Sung Gyu
Issue Date
May-2017
Publisher
KOREAN INST METALS MATERIALS
Keywords
thin-film resistor; tantalum nitride thin film; RFIC; patterned ground shield; CMOS; resistance
Citation
ELECTRONIC MATERIALS LETTERS, v.13, no.3, pp 230 - 234
Pages
5
Journal Title
ELECTRONIC MATERIALS LETTERS
Volume
13
Number
3
Start Page
230
End Page
234
URI
https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/4490
DOI
10.1007/s13391-017-1723-x
ISSN
1738-8090
2093-6788
Abstract
We report the analysis of the radiofrequency (RF) characteristics according to the size, area, and shape of TaN thin-film resistor (TFR) layers. As the TFR size increased, its characteristics were degraded with increasing frequency owing to the increased capacitive parasitic components. As the frequency increased from 1 MHz to 10 GHz, the effective resistance decreased by approximately 12.5%, 16.4%, and 37.8% when the resistor widths and lengths were 0.5 x 20, 1 x 40, and 2 x 80 mu m, respectively. To optimize the performance of the high-frequency TFR, ensuring RF isolation via sufficient separation from the silicon substrates was crucial. To realize this RF isolation, methods for minimizing the effect of lossy Si substrates by using TFRs with a smaller area or by forming a patterned ground shield should be introduced.
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College of ICT Engineering > School of Integrative Engineering > 1. Journal Articles
College of Natural Sciences > Department of Physics > 1. Journal Articles

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Pyo, Sung Gyu
창의ICT공과대학 (융합공학부)
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