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Results 1-1 of 1 (Search time: 0.004 seconds).
The Dry Etching Characteristics of HfAlO3 Thin Films in CF4/Cl-2/Ar Inductively Coupled Plasma
Woo, Jong-Chang; Ha, Tae-Kyung;
Kim, Chang-Il
Article
Issue Date
2012
Citation
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.159, no.1, pp D26 - D30
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ELECTROCHEMICAL SOC INC
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Kim, Chang Il
1
Ha, Tae-Kyung
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Woo, Jong-Chang
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GATE DIELECTRICS
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HFO2 FILMS
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SILICON
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