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강유전체 YMnO3 박막 식각에 대한 CF4 첨가효과
박재화; 김경태;
김창일
; 장의구; 이철인
Article
Issue Date
2002
Citation
전기전자재료학회논문지, v.15, no.4
Publisher
한국전기전자재료학회
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Kim, Chang Il
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김동표
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ICP
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Etching
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Ferroelectric
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