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Results 1-1 of 1 (Search time: 0.002 seconds).
Study on the etching damage characteristics of PZT thin films after etching in Cl-based plasma
Kim, KT; Kang, MG;
Kim, CI
Article
Issue Date
2004
Citation
MICROELECTRONIC ENGINEERING, v.71, no.3-4, pp 294 - 300
Publisher
ELSEVIER SCIENCE BV
1
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Author
Kim, Chang Il
1
Kim, KT
1
Subject
etching
1
etching damage
1
ferroelectric properties
1
ferroelectric random access memories
1
GAS
1
INDUCTIVELY-COUPLED PLASMAS
1
Pb(Zr,Ti)O-3
1
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Article
1
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