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Results 1-2 of 2 (Search time: 0.004 seconds).
Etching characteristics and mechanisms of SrBi2Ta2O9 thin films in CF4/Ar and Cl-2/Ar inductively coupled plasmas
Efremov, AM; Kim, DP;
Kim, CI
Article
Issue Date
2005
Citation
THIN SOLID FILMS, v.471, no.1-2, pp 328 - 335
Publisher
ELSEVIER SCIENCE SA
Etching characteristics of Pb(Zr,Ti)O-3 thin films in Cl-2/Ar and CF4/Ar inductively coupled plasmas: effect of gas mixing ratios
Efremov, AM; Kim, DP;
Kim, CI
Article
Issue Date
2005
Citation
THIN SOLID FILMS, v.474, no.1-2, pp 267 - 274
Publisher
ELSEVIER SCIENCE SA
1
Discover
Author
Kim, Chang Il
2
Efremov, AM
2
Subject
CHLORINE PLASMAS
2
CL-2-AR PLASMAS
2
DIAGNOSTICS
2
dissociation
2
electron temperature
2
ELECTRON TEMPERATURES
2
etch rate
2
GLOBAL-MODEL
2
ion-assisted etching
2
MODULATED HIGH-DENSITY
2
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Date Issued
2005
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