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Results 1-2 of 2 (Search time: 0.004 seconds).
Plasma-induced damage in PZT thin films etched by inductively coupled plasma
Kang, MG; Kim, KT;
Kim, CI
Article
Issue Date
2003
Citation
THIN SOLID FILMS, v.435, no.1-2, pp 222 - 226
Publisher
ELSEVIER SCIENCE SA
Recovery of plasma-induced damage in PZT thin film with O-2 gas annealing
Kang, MG; Kim, KT;
Kim, CI
Article
Issue Date
2001
Citation
THIN SOLID FILMS, v.398-399, pp 448 - 453
Publisher
ELSEVIER SCIENCE SA
1
Discover
Author
Kim, Chang Il
2
Kim, KT
2
Subject
etching
2
dielectrics
1
electrical properties and measure...
1
ferroelectric properties
1
ferroelectric random access memor...
1
INDUCTIVELY-COUPLED PLASMAS
1
Pt/Zr/Ti (PZT)
1
PZT
1
thin film
1
Date Issued
2003
1
2001
1
Type
Article
2
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