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On mechanisms of argon addition influence on etching rate in chlorine plasma
Efremov, AM; Kim, DP;
Kim, CI
Article
Issue Date
2003
Citation
THIN SOLID FILMS, v.435, no.1-2, pp 232 - 237
Publisher
ELSEVIER SCIENCE SA
Volume and heterogeneous chemistry of active species in chlorine plasma
Efremov, AM; Kim, DP;
Kim, CI
Article
Issue Date
2003
Citation
THIN SOLID FILMS, v.435, no.1-2, pp 83 - 88
Publisher
ELSEVIER SCIENCE SA
Effect of the gas mixing ratio on the plasma parameters and the gas phase composition in Cl-2/CF4 inductively coupled plasmas
Efremov, AM; Kim, DP;
Kim, CI
Article
Issue Date
2003
Citation
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.43, no.6, pp 1042 - 1048
Publisher
KOREAN PHYSICAL SOC
1
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Author
Kim, Chang Il
3
Efremov, AM
3
Kim, DP
3
Subject
ionization
3
chlorine plasma
2
electron impact
2
rate coefficient
2
ACTINOMETRY
1
CF4
1
CL-2-AR PLASMAS
1
Cl-2/CF4
1
DISCHARGES
1
electron temperature
1
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