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Results 1-1 of 1 (Search time: 0.003 seconds).
Effect of the gas mixing ratio on the plasma parameters and the gas phase composition in Cl-2/CF4 inductively coupled plasmas
Efremov, AM; Kim, DP;
Kim, CI
Article
Issue Date
2003
Citation
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.43, no.6, pp 1042 - 1048
Publisher
KOREAN PHYSICAL SOC
1
Discover
Author
Kim, Chang Il
1
Efremov, AM
1
Kim, DP
1
Subject
ACTINOMETRY
1
CF4
1
CL-2-AR PLASMAS
1
Cl-2/CF4
1
DISCHARGES
1
electron temperature
1
ELECTRON TEMPERATURES
1
ETCHING CHARACTERISTICS
1
GLOBAL-MODEL
1
ionization
1
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Date Issued
2003
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