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Results 1-1 of 1 (Search time: 0.003 seconds).
Etch characteristics of TiN/Al2O3 thin film by using a Cl-2/Ar adaptive coupled plasma
Woo, Jong-Chang; Kim, Seung-Han;
Kim, Chang-Il
Article
Issue Date
2011
Citation
VACUUM, v.86, no.4, pp 403 - 408
Publisher
PERGAMON-ELSEVIER SCIENCE LTD
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Author
Kim, Chang Il
1
Kim, Seung-Han
1
Woo, Jong-Chang
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Adaptive coupled plasma
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IMPACT
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TiN
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TITANIUM
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XPS
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ENG
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VACUUM
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