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Results 1-1 of 1 (Search time: 0.003 seconds).
Surface reaction effects on dry etching of IGZO thin films in N-2/BCl3/Ar plasma
Joo, Young-Hee; Woo, Jong-Chang;
Kim, Chang-Il
Article
Issue Date
2013
Citation
MICROELECTRONIC ENGINEERING, v.112, pp 74 - 79
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ELSEVIER SCIENCE BV
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Kim, Chang Il
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FESEM
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ICP
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IGZO
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SEMICONDUCTORS
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