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Results 1-1 of 1 (Search time: 0.003 seconds).
Effect of CF4 Addition to Cl-2/Ar Plasma on the Etching of ZrO2 Thin Films
Son, Seok; Joo, Young-Hee;
Kim, Chang-Il
Article
Issue Date
2016
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.16, no.12, pp 12886 - 12889
Publisher
AMER SCIENTIFIC PUBLISHERS
1
Discover
Author
Kim, Chang Il
1
Son, Seok
1
Subject
AFM
1
ICP
1
OES
1
ZrO2
1
Type
Article
1
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ENG
1
Journal
JOURNAL OF NANOSCIENCE AND NANOTE...
1
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