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Results 1-1 of 1 (Search time: 0.003 seconds).
Surface reaction effects on dry etching of IGZO thin films in N-2/BCl3/Ar plasma
Joo, Young-Hee; Woo, Jong-Chang;
Kim, Chang-Il
Article
Issue Date
2013
Citation
MICROELECTRONIC ENGINEERING, v.112, pp 74 - 79
Publisher
ELSEVIER SCIENCE BV
1
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Author
Kim, Chang Il
1
Woo, Jong-Chang
1
Subject
ICP
1
IGZO
1
SEMICONDUCTORS
1
TRANSISTORS
1
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ENG
1
Journal
MICROELECTRONIC ENGINEERING
1
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