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Etching mechanism of Au thin films in Cl2/Ar inductively coupled plasma
Efremov, A.; Svettsov, V.;
Kim, C.-I.
Article
Issue Date
2004
Citation
Proceedings of SPIE - The International Society for Optical Engineering, v.5401, pp 72 - 78
1
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Author
Efremov, A.
1
Svettsov, V.
1
Subject
Carrier concentration
1
Chlorine
1
Dissociation
1
Electron temperature
1
Emission spectroscopy
1
Gold
1
Ion bombardment
1
Langmuir probe measurements
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Modeling
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Optical emission spectroscopy
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Date Issued
2004
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Proceedings of SPIE - The Interna...
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