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Results 1-1 of 1 (Search time: 0.004 seconds).
Dry etching characteristics of TiN thin films in CF4/BCl3/N-2 plasma
Joo, Young-Hee; Woo, Jong-Chang;
Kim, Chang-Il
Article
Issue Date
2012
Citation
THIN SOLID FILMS, v.520, no.6, pp 2339 - 2342
Publisher
ELSEVIER SCIENCE SA
1
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Author
Kim, Chang Il
1
Joo, Young-Hee
1
Woo, Jong-Chang
1
Subject
Boron trichloride
1
DIELECTRICS
1
Inductively coupled plasma
1
INDUCTIVELY-COUPLED PLASMA
1
Nitrogen
1
Scanning electron microscopy
1
Titanium nitride
1
Date Issued
2012
1
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