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유도결합플라즈마를 이용한 O2/BCl3/Ar가스에 따른 Indium Tin Oxide 박막의 식각 특성 연구
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위재형; 우종창;
김창일
Article
Issue Date
2010
Citation
전기전자재료학회논문지, v.23, no.10, pp 752 - 758
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한국전기전자재료학회
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Author
Kim, Chang Il
1
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위재형
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Subject
Inductively coupled plasma
1
ITO
1
O2/BCl3/Ar
1
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Article
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Journal
전기전자재료학회논문지
1
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