한국어
LIBRARY
Communities & Collections
Researchers
Titles
Issue Date
Journals
검색
Search
All of ScholarWorks
College of ICT Engineering
School of Electrical and Electronics Engineering
1. Journal Articles
Current filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Current filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Current filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Current filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Current filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 1-2 of 2 (Search time: 0.007 seconds).
BCl₃/Ar 플라즈마에 Cl₂ 가스 첨가에 따른 TiN 박막의 식각 특성
엄두승; 우종창; 김동표;
김창일
Article
Issue Date
2008
Citation
전기전자재료학회논문지, v.21, no.12, pp 1051 - 1056
Publisher
한국전기전자재료학회
유도 결합 플라즈마를 이용한 TiN 박막의 식각 특성
엄두승; 강창민; 양설; 김동표;
김창일
Article
Issue Date
2008
Citation
한국표면공학회지, v.41, no.3, pp 83 - 87
Publisher
한국표면공학회
1
Discover
Author
Kim, Chang Il
2
엄두승
2
강창민
1
양설
1
우종창
1
Subject
BCl₃/Ar
2
ICP
2
Plasma
2
Cl₂
1
Date Issued
2008
2
Journal
전기전자재료학회논문지
1
한국표면공학회지
1
BROWSE
한국어
Communities & Collections
Researchers
Titles
Journals
LIBRARY