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Design and fabrication of low-voltage twisting-type thermal actuators for micromirrors
- Authors
- Kim, D.H.; Park, S.; Kwon, O.; Choi, Y.K.; Lee, J.S.
- Issue Date
- 2010
- Keywords
- Bimorph thermal actuator; MEMS fabrication; Micromirror; Twisting actuation
- Citation
- Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009, v.2, pp 373 - 375
- Pages
- 3
- Journal Title
- Proceedings of the ASME Micro/Nanoscale Heat and Mass Transfer International Conference 2009, MNHMT2009
- Volume
- 2
- Start Page
- 373
- End Page
- 375
- ISSN
- 0000-0000
- Abstract
- A twisting-type micromirror that can be driven by two thermal bimorph actuators bending in opposite directions is designed from electro-thermo- mechanical theories and fabricated through a simple MEMS process. Each actuator consists of SiO2and gold thin-film layers. A simplified analytical model has been built to optimize the performance 3f micromirrors. Operation of the actuation system agrees well with predictions from theoretical models and simulations using a commercial code. Copyright © 2009 by ASME.
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