FABRICATION OF ELECTROSTATICALLY-ACTUATED, IN-PLANE FUSED QUARTZ RESONATORS USING SILICON-ON-QUARTZ (SOQ) BONDING AND QUARTZ DRIE
- Authors
- Hwang, Young-Suk; Jung, Hyoung-Kyoon; Song, Eun-Seok; Hyeon, Ik-Jae; Kim, Yong-Kweon; Baek, Chang-Wook
- Issue Date
- 2009
- Publisher
- IEEE
- Citation
- IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009), pp 729 - 732
- Pages
- 4
- Journal Title
- IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009)
- Start Page
- 729
- End Page
- 732
- URI
- https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/54261
- DOI
- 10.1109/MEMSYS.2009.4805486
- ISSN
- 1084-6999
- Abstract
- This paper reports a novel process to fabricate electrostatically-actuated, in-plane micromechanical resonators made of fused quartz for high-Q microsensor applications. Two key processes - low temperature plasma-assisted Silicon-on-Quartz (SoQ) direct bonding and quartz DRIE using C4F8/He plasma - have been used in combination with thin metallization to fabricate fused quartz resonators driven by electrostatic force. The proposed method enables wafer-level fabrication of fused quartz resonators readily mounted on the substrate, which is advantageous over the conventional fabrication method of quartz crystal resonators. By using the proposed process, 40-mu m-thick laterally-driven fused quartz cantilever resonators have been successfully fabricated. The measured Q-values of the metal-coated fused quartz cantilevers are 21,700 similar to 48,900 according to the length of the cantilever.
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Collections - College of ICT Engineering > School of Electrical and Electronics Engineering > 1. Journal Articles
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