Schottky diode formation and characterization of titanium tungsten to n- and p-type 4H silicon carbide
DC Field | Value | Language |
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dc.contributor.author | Lee, S.-K. | - |
dc.contributor.author | Zetterling, C.-M. | - |
dc.contributor.author | Ostling, M. | - |
dc.date.accessioned | 2022-04-27T03:40:20Z | - |
dc.date.available | 2022-04-27T03:40:20Z | - |
dc.date.issued | 2000-06 | - |
dc.identifier.issn | 0021-8979 | - |
dc.identifier.issn | 1089-7550 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/56914 | - |
dc.description.abstract | Titanium tungsten (Ti0.58W0.42) Schottky contacts to both n- and p-type 4H silicon carbide were fabricated using sputtering. The n- as well as p-type Schottky contacts had excellent rectifying characteristics after vacuum annealing at 500 degrees C with a thermally stable ideality factor of 1.06 +/- 0.03 for n-type and 1.08 +/- 0.01 for p-type. The measured Schottky barrier height (SBH) was 1.22 +/- 0.03 eV for n-type and 1.93 +/- 0.01 eV for p-type in the range of 24-300 degrees C. Our results of Ti0.58W0.42 Schottky contacts to both n- and p-type can be explained perfectly by thermionic emission theory and also satisfy the Schottky-Mott model in contrast to earlier works. Capacitance-voltage measurements were also performed and the results were in good agreement with those of current-voltage measurements. In addition, the inhomogeneous behavior with higher ideality factor and lower SBH of p-type Ti0.58W0.42 contacts for as-deposited contacts is explained by using a model with contribution of recombination current originated by lattice defects to thermionic emission current. (C) 2000 American Institute of Physics. [S0021-8979(00)05911-9]. | - |
dc.format.extent | 6 | - |
dc.language | 영어 | - |
dc.language.iso | ENG | - |
dc.publisher | AMER INST PHYSICS | - |
dc.title | Schottky diode formation and characterization of titanium tungsten to n- and p-type 4H silicon carbide | - |
dc.type | Article | - |
dc.identifier.doi | 10.1063/1.373494 | - |
dc.identifier.bibliographicCitation | JOURNAL OF APPLIED PHYSICS, v.87, no.11, pp 8039 - 8044 | - |
dc.description.isOpenAccess | N | - |
dc.identifier.wosid | 000087067400067 | - |
dc.citation.endPage | 8044 | - |
dc.citation.number | 11 | - |
dc.citation.startPage | 8039 | - |
dc.citation.title | JOURNAL OF APPLIED PHYSICS | - |
dc.citation.volume | 87 | - |
dc.type.docType | Article | - |
dc.publisher.location | 미국 | - |
dc.subject.keywordPlus | BARRIER DIODES | - |
dc.subject.keywordPlus | OHMIC CONTACTS | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
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