Bubble nucleation and behavior on micro square heaters
- Authors
- Jung, JY; Kwak, HY
- Issue Date
- Apr-2006
- Publisher
- TAYLOR & FRANCIS INC
- Keywords
- bubble nucleation; micro square heater; temperature distribution
- Citation
- NANOSCALE AND MICROSCALE THERMOPHYSICAL ENGINEERING, v.10, no.2, pp 95 - 107
- Pages
- 13
- Journal Title
- NANOSCALE AND MICROSCALE THERMOPHYSICAL ENGINEERING
- Volume
- 10
- Number
- 2
- Start Page
- 95
- End Page
- 107
- URI
- https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/65434
- DOI
- 10.1080/10893950600643147
- ISSN
- 1556-7265
1556-7273
- Abstract
- In this study, micro square polysilicon heaters having dimensions of 65 x 65 mu m(2) and 100 x 100 mu m(2) were fabricated on a silicon dioxide layer, and bubble nucleation experiments on the heaters were performed. Bubble nucleation temperature was measured using a bridge circuit, and the photographs of bubble nucleation and subsequent growth were taken by a 35-mm camera with a mu s flash unit. Measured bubble nucleation temperatures were found to be closer to the superheat limit of the working fluid of FC-72. A quasi-1-D solution obtained from the 2-D heat diffusion equation yielded proper temperature distribution of the square heaters at steady state; however, it failed to predict the temperature rise up to the steady state. The time-dependent temperatures similar to the observed values can be obtained with much lower value of thermal diffusivity than the bulk property of the polysilicon heater used. For the 100 x 100 mu m(2) square heater, nucleation of several bubbles was observed, but for the 65 x 65 mu m(2) heater, only that of one bubble was observed.
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Collections - College of Engineering > School of Mechanical Engineering > 1. Journal Articles
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