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Annealing temperature effect of PbZr0.4Ti0.6O3 film on La1/2Sr1/2CoO3 bottom electrode

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dc.contributor.authorKim, J.-H.-
dc.contributor.authorKoh, K.S.-
dc.contributor.authorChoo, W.K.-
dc.date.accessioned2023-03-09T01:16:18Z-
dc.date.available2023-03-09T01:16:18Z-
dc.date.issued2004-03-
dc.identifier.issn0255-5476-
dc.identifier.urihttps://scholarworks.bwise.kr/cau/handle/2019.sw.cau/65586-
dc.description.abstractWe have investigated the ferroelectric and electrical properties of PZT 40/60 films on the bottom La1/2Sr1/2CoO3(LSCO) electrode. The LSCO bottom electrode was sputtered on the SiO2/Si(100). As the annealing temperature of PZT capacitors on the LSCO is increased, the ferroelectric properties gradually increase with the annealing temperature up to 650degreesC. However, for the PZT capacitors annealed above 650degreesC, electrical measurement cannot be performed.-
dc.format.extent4-
dc.language영어-
dc.language.isoENG-
dc.publisherTRANS TECH PUBLICATIONS LTD-
dc.titleAnnealing temperature effect of PbZr0.4Ti0.6O3 film on La1/2Sr1/2CoO3 bottom electrode-
dc.typeArticle-
dc.identifier.doi10.4028/www.scientific.net/MSF.449-452.957-
dc.identifier.bibliographicCitationDESIGNING, PROCESSING AND PROPERTIES OF ADVANCED ENGINEERING MATERIALS, PTS 1 AND 2, v.449-4, no.II, pp 957 - 960-
dc.description.isOpenAccessN-
dc.identifier.wosid000189492000236-
dc.identifier.scopusid2-s2.0-18744421645-
dc.citation.endPage960-
dc.citation.numberII-
dc.citation.startPage957-
dc.citation.titleDESIGNING, PROCESSING AND PROPERTIES OF ADVANCED ENGINEERING MATERIALS, PTS 1 AND 2-
dc.citation.volume449-4-
dc.type.docTypeArticle; Proceedings Paper-
dc.subject.keywordAuthorsol-gel processes-
dc.subject.keywordAuthorX-ray methods-
dc.subject.keywordAuthorferroelectric properties-
dc.subject.keywordAuthorPZT-
dc.subject.keywordAuthorLSCO-
dc.subject.keywordPlusLA0.5SR0.5COO3-
dc.subject.keywordPlusCAPACITORS-
dc.subject.keywordPlusTITANATE-
dc.relation.journalResearchAreaMaterials Science-
dc.relation.journalResearchAreaMetallurgy & Metallurgical Engineering-
dc.relation.journalWebOfScienceCategoryMaterials Science, Ceramics-
dc.relation.journalWebOfScienceCategoryMaterials Science, Multidisciplinary-
dc.relation.journalWebOfScienceCategoryMetallurgy & Metallurgical Engineering-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
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