Molecular dynamics simulations of ionized cluster beam deposition: case of study of aluminum
- Authors
- Kang, J.W.; Hwang, H.J.
- Issue Date
- Aug-2001
- Publisher
- ELSEVIER SCIENCE BV
- Keywords
- cluster deposition; molecular dynamics simulation; correlated collisions
- Citation
- COMPUTATIONAL MATERIALS SCIENCE, v.21, no.4, pp 509 - 514
- Pages
- 6
- Journal Title
- COMPUTATIONAL MATERIALS SCIENCE
- Volume
- 21
- Number
- 4
- Start Page
- 509
- End Page
- 514
- URI
- https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/66202
- DOI
- 10.1016/S0927-0256(01)00199-9
- ISSN
- 0927-0256
1879-0801
- Abstract
- In order to understand interactions between energetic Al clusters and Al(1 0 0) surfaces, we investigated the cluster-size dependence of the maximum substrate temperature T-max and of the time t(max) within which this temperature is reached. We considered two cases: (1) clusters with the same total energy E-T and (2) clusters with the same energy per atom. The temperature T-max changed linearly with both the energy per atom and the total energy of the cluster. When E-T was constant and the cluster size increased, the time t(max) approached a constant value because energy was rapidly transferred to the substrate by correlated collisions. As the size and energy of clusters increase, such correlated collisions play a progressively important role in their interactions with surfaces. (C) 2001 Elsevier Science B.V. All rights reserved.
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Collections - College of ICT Engineering > School of Electrical and Electronics Engineering > 1. Journal Articles
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