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A Method to Fabricate Low-Cost and Large Area Vitreous Carbon Mold for Glass Molded Microstructures

Authors
Ju, JonghyunLim, SeraSeok, JongwonKim, Seok-min
Issue Date
Feb-2015
Publisher
KOREAN SOC PRECISION ENG
Keywords
Glass microstructure; Glass molding; Vitreous carbon; Carbonization; Furan precursor
Citation
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, v.16, no.2, pp 287 - 291
Pages
5
Journal Title
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING
Volume
16
Number
2
Start Page
287
End Page
291
URI
https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/9919
DOI
10.1007/s12541-015-0038-9
ISSN
2234-7593
2005-4602
Abstract
A method to fabricate a vitreous carbon (VC) mold for glass molded microstructures was investigated by replicating a microstructured furan precursor and carbonization process. The composition of a furan-based thermal curable polymer was optimized along with the processing parameters of thermal curing and carbonization processes to improve the surface quality of microcavities on the VC mold. The engineering feasibility of the proposed method was ensured by successfully molding glass micro-grating structures with a pitch of similar to 46.3 mu m and a height of similar to 3.8 mu m using the fabricated VC molds.
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공과대학 (기계공학부)
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