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Ar/CF4 유도결합 플라즈마를 이용한 BET 박막의 식각 메커니즘
임규태; 김경태; 김동표;
김창일
Article
Issue Date
2003
Citation
전기전자재료학회논문지, v.16, no.4
Publisher
한국전기전자재료학회
CF4/O2 Gas Chemistry에 의해 식각된 Ru 박막의 표면 반응
임규태; 김동표; 김경태;
김창일
; 최장현; 송준태
Article
Issue Date
2002
Citation
전기전자재료학회논문지, v.15, no.12
Publisher
한국전기전자재료학회
1
Discover
Author
김경태
2
김동표
2
송준태
1
최장현
1
Subject
Etching
2
ICP
2
CF4/O2
1
XPS
1
Date Issued
2003
1
2002
1
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