한국어
LIBRARY
Communities & Collections
Researchers
Titles
Issue Date
Journals
검색
Search
All of ScholarWorks
College of Art and Technology
College of Arts
College of Biotechnology & Natural Resource
College of Business & Economics
College of Education
College of Engineering
College of Humanities
College of ICT Engineering
College of Medicine
College of Natural Sciences
College of Pharmacy
College of Social Sciences
College of Software
College of Sport Science
Da Vinci College of General Education
ETC
Graduate School
Graduate School of Advanced Imaging Sciences, Multimedia and Film
Graduate School of Arts
Graduate School of Construction Engineering
Graduate School of Education
Graduate School of International Studies
Law School
Red Cross College of Nursing
The Office of Research Affairs
Current filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Current filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Current filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 1-3 of 3 (Search time: 0.003 seconds).
Study on the etching damage characteristics of PZT thin films after etching in Cl-based plasma
Kim, KT; Kang, MG;
Kim, CI
Article
Issue Date
2004
Citation
MICROELECTRONIC ENGINEERING, v.71, no.3-4, pp 294 - 300
Publisher
ELSEVIER SCIENCE BV
Recovery of plasma-induced damage in PZT thin film with O-2 gas annealing
Kang, MG; Kim, KT;
Kim, CI
Article
Issue Date
2001
Citation
THIN SOLID FILMS, v.398-399, pp 448 - 453
Publisher
ELSEVIER SCIENCE SA
Plasma-induced damage in PZT thin films etched by inductively coupled plasma
Kang, MG; Kim, KT;
Kim, CI
Article
Issue Date
2003
Citation
THIN SOLID FILMS, v.435, no.1-2, pp 222 - 226
Publisher
ELSEVIER SCIENCE SA
1
Discover
Author
Kim, KT
3
Subject
ferroelectric properties
2
INDUCTIVELY-COUPLED PLASMAS
2
dielectrics
1
electrical properties and measure...
1
etching damage
1
ferroelectric random access memories
1
ferroelectric random access memor...
1
GAS
1
Pb(Zr,Ti)O-3
1
Pt/Zr/Ti (PZT)
1
.
next >
Date Issued
2004
1
2003
1
2001
1
Type
Article
3
Language
ENG
3
Journal
THIN SOLID FILMS
2
MICROELECTRONIC ENGINEERING
1
BROWSE
한국어
Communities & Collections
Researchers
Titles
Journals
LIBRARY